Determining the acoustic resistance of small sound holes for MEMS microphones Proc. Eurosensors XXV, September 4-7, 2011, Athens, Greece

Determining the acoustic resistance of small sound holes for MEMS microphones Proc. Eurosensors XXV, September 4-7, 2011, Athens, Greece Feiertag, Gregor (DE-588)114909857 aut Winter, Matthias (DE-588)109952553 aut Bakardjiev, Petko aut Schröder, Elmar (DE-588)185552307 aut Siegel, Christian (DE-588)109007212 aut Yusufi, Mustafa aut Iskra, Peter (DE-588)1020623306 aut Leidl, Anton (DE-588)106334948 aut software, multimedia eng MEMS Mikrofon Procedia Engineering https://doi.org/10.1016/j.proeng.2011.12.373 urn:nbn:de:bvb:m347-dtl-0000000905

Determining the acoustic resistance of small sound holes for MEMS microphones Proc. Eurosensors XXV, September 4-7, 2011, Athens, Greece

Feiertag, Gregor (DE-588)114909857 aut

Winter, Matthias (DE-588)109952553 aut

Bakardjiev, Petko aut

Schröder, Elmar (DE-588)185552307 aut

Siegel, Christian (DE-588)109007212 aut

Yusufi, Mustafa aut

Iskra, Peter (DE-588)1020623306 aut

Leidl, Anton (DE-588)106334948 aut

software, multimedia

eng

MEMS

Mikrofon

Procedia Engineering https://doi.org/10.1016/j.proeng.2011.12.373

urn:nbn:de:bvb:m347-dtl-0000000905


Determining the acoustic resistance of small sound holes for MEMS microphones Proc. Eurosensors XXV, September 4-7, 2011, Athens, Greece Feiertag, Gregor (DE-588)114909857 aut Winter, Matthias (DE-588)109952553 aut Bakardjiev, Petko aut Schröder, Elmar (DE-588)185552307 aut Siegel, Christian (DE-588)109007212 aut Yusufi, Mustafa aut Iskra, Peter (DE-588)1020623306 aut Leidl, Anton (DE-588)106334948 aut software, multimedia eng MEMS Mikrofon Procedia Engineering https://doi.org/10.1016/j.proeng.2011.12.373 urn:nbn:de:bvb:m347-dtl-0000000905