Fabrication and characterization of a piezoresistive humidity sensor with a stress-free package

Fabrication and characterization of a piezoresistive humidity sensor with a stress-free package Waber, Tobias (DE-588)1079797629 aut Sax, M. (DE-588)1142874419 aut Pahl, Wolfgang (DE-588)113042345 aut Stufle, S. aut Leidl, Anton (DE-588)106334948 aut Guenther, Margarita (DE-588)1142876195 aut Feiertag, Gregor Verfasser (DE-588)114909857 aut software, multimedia eng Journal of Sensors and Sensor Systems https://doi.org/10.5194/jsss-3-167-2014 urn:nbn:de:bvb:m347-dtl-0000000910

Fabrication and characterization of a piezoresistive humidity sensor with a stress-free package

Waber, Tobias (DE-588)1079797629 aut

Sax, M. (DE-588)1142874419 aut

Pahl, Wolfgang (DE-588)113042345 aut

Stufle, S. aut

Leidl, Anton (DE-588)106334948 aut

Guenther, Margarita (DE-588)1142876195 aut

Feiertag, Gregor Verfasser (DE-588)114909857 aut

software, multimedia

eng

Journal of Sensors and Sensor Systems https://doi.org/10.5194/jsss-3-167-2014

urn:nbn:de:bvb:m347-dtl-0000000910


Fabrication and characterization of a piezoresistive humidity sensor with a stress-free package Waber, Tobias (DE-588)1079797629 aut Sax, M. (DE-588)1142874419 aut Pahl, Wolfgang (DE-588)113042345 aut Stufle, S. aut Leidl, Anton (DE-588)106334948 aut Guenther, Margarita (DE-588)1142876195 aut Feiertag, Gregor Verfasser (DE-588)114909857 aut software, multimedia eng Journal of Sensors and Sensor Systems https://doi.org/10.5194/jsss-3-167-2014 urn:nbn:de:bvb:m347-dtl-0000000910